Electron Beam Interactions with Solids Book

Electron Beam Interactions with Solids


  • Author : Maurizio Dapor
  • Publisher : Springer Science & Business Media
  • Release Date : 2003-04-23
  • Genre: Science
  • Pages : 103
  • ISBN 10 : 9783540006527

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Electron Beam Interactions with Solids Excerpt :

The interaction of electron beams with solid targets has been studied since the early part of the last century. Present interest is spurred on by the fundamental role played by the electron-solid interaction in - among other areas - scanning electron microscopy, electron-probe microanalysis and Auger electron spectroscopy. This book aims to investigate selected aspects of the interaction of electrons with matter (backscattering coefficient for bulk targets, absorption, backscattering and transmission for supported and unsupported thin films, implantation profiles, secondary electron emission and so on); to study the probabilistic laws of interaction of the individual electrons with the atoms (elastic and inelastic cross sections); to introduce the Monte Carlo method and its use for computing the macroscopic characteristics of the interaction processes. Each chapter compares theory, simulations and experimental data.

Electron Beam Interactions with Solids Book

Electron Beam Interactions with Solids


  • Author : Maurizio Dapor
  • Publisher : Springer
  • Release Date : 2003-07-03
  • Genre: Science
  • Pages : 110
  • ISBN 10 : 9783540365075

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Electron Beam Interactions with Solids Excerpt :

The interaction of an electron beam with a solid target has been studied since the early part of the past century. Since 1960, the electron–solid interaction hasbecomethesubjectofanumberofinvestigators’workowingtoitsfun- mental role in scanning electron microscopy, in electron-probe microanalysis, in Auger electron spectroscopy, in electron-beam lithography and in radiation damage. The interaction of an electron beam with a solid target has often been investigated theoretically by using the Monte Carlo method, a nume- cal procedure involving random numbers that is able to solve mathematical problems. This method is very useful for the study of electron penetration in matter. The probabilistic laws of the interaction of an individual electron with the atoms constituting the target are well known. Consequently, it is possible to compute the macroscopic characteristics of interaction processes by simulating a large number of real trajectories, and then averaging them. The aim of this book is to study the probabilistic laws of the interaction of individual electrons with atoms (elastic and inelastic cross-sections); to - vestigate selected aspects of electron interaction with matter (backscattering coe?cients for bulk targets, absorption, backscattering and transmission for both supported and unsupported thin ?lms, implantation pro?les, seconda- electron emission, and so on); and to introduce the Monte Carlo method and its applications to compute the macroscopic characteristics of the inter- tion processes mentioned above. The book compares theory, computational simulations and experimental data in order to o?er a more global vision.

Electron Beam Interactions with Solids Book

Electron Beam Interactions with Solids


  • Author : Maurizio Dapor
  • Publisher : Springer
  • Release Date : 2003-04-23
  • Genre: Science
  • Pages : 110
  • ISBN 10 : 3540006524

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Electron Beam Interactions with Solids Excerpt :

The interaction of an electron beam with a solid target has been studied since the early part of the past century. Since 1960, the electron–solid interaction hasbecomethesubjectofanumberofinvestigators’workowingtoitsfun- mental role in scanning electron microscopy, in electron-probe microanalysis, in Auger electron spectroscopy, in electron-beam lithography and in radiation damage. The interaction of an electron beam with a solid target has often been investigated theoretically by using the Monte Carlo method, a nume- cal procedure involving random numbers that is able to solve mathematical problems. This method is very useful for the study of electron penetration in matter. The probabilistic laws of the interaction of an individual electron with the atoms constituting the target are well known. Consequently, it is possible to compute the macroscopic characteristics of interaction processes by simulating a large number of real trajectories, and then averaging them. The aim of this book is to study the probabilistic laws of the interaction of individual electrons with atoms (elastic and inelastic cross-sections); to - vestigate selected aspects of electron interaction with matter (backscattering coe?cients for bulk targets, absorption, backscattering and transmission for both supported and unsupported thin ?lms, implantation pro?les, seconda- electron emission, and so on); and to introduce the Monte Carlo method and its applications to compute the macroscopic characteristics of the inter- tion processes mentioned above. The book compares theory, computational simulations and experimental data in order to o?er a more global vision.

Charged Beam Interaction with Solids Book

Charged Beam Interaction with Solids


  • Author : Yoshihiko Ōtsuki
  • Publisher : John Benjamins Publishing Company
  • Release Date : 1983
  • Genre: Channeling (Physics)
  • Pages : 248
  • ISBN 10 : UCAL:B4227937

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Charged Beam Interaction with Solids Excerpt :

Silicon Integrated Circuits Book

Silicon Integrated Circuits


  • Author : Dawon Kahng
  • Publisher : Academic Press
  • Release Date : 2016-08-10
  • Genre: Technology & Engineering
  • Pages : 370
  • ISBN 10 : 9781483214788

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Silicon Integrated Circuits Excerpt :

Silicon Integrated Circuits, Part 2 covers some of the most promising approaches along with the new understanding of processing-related areas of physics and chemistry. The first chapter is about the transient thermal processing of silicon, including annealing with directed-energy beams and rapid isothermal annealing; adiabatic annealing with laser and electron beams; pulsed melting; thermal flux annealing; rapid isothermal annealing; and several applications stemming from rapid annealing and semiconductor processing with directed-energy beams. The second chapter is concerned with the use of electron cyclotron resonance plasmas in two important materials processing techniques: reactive ion-beam etching and plasma deposition. The last chapter of the book deals with the exploding area of very large scale integration processing and process simulation. Physicists, chemists, and engineers involved in silicon integrated circuits will find the book invaluable.

Introduction to Focused Ion Beams Book

Introduction to Focused Ion Beams


  • Author : Lucille A. Giannuzzi
  • Publisher : Springer Science & Business Media
  • Release Date : 2006-05-18
  • Genre: Science
  • Pages : 357
  • ISBN 10 : 9780387233130

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Introduction to Focused Ion Beams Excerpt :

Introduction to Focused Ion Beams is geared towards techniques and applications. This is the only text that discusses and presents the theory directly related to applications and the only one that discusses the vast applications and techniques used in FIBs and dual platform instruments.

VLSI Science and Technology 1982 Book

VLSI Science and Technology 1982


  • Author : Conrad J. Dell'Oca
  • Publisher : Unknown
  • Release Date : 1982
  • Genre: Integrated circuits
  • Pages : 380
  • ISBN 10 : UCAL:B4113095

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VLSI Science and Technology 1982 Excerpt :

Scanning Electron Microscopy Book

Scanning Electron Microscopy


  • Author : Ludwig Reimer
  • Publisher : Springer
  • Release Date : 2013-11-11
  • Genre: Science
  • Pages : 529
  • ISBN 10 : 9783540389675

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Scanning Electron Microscopy Excerpt :

Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.

Laser Assisted Microtechnology Book

Laser Assisted Microtechnology


  • Author : Simeon M. Metev
  • Publisher : Springer Science & Business Media
  • Release Date : 2013-03-08
  • Genre: Technology & Engineering
  • Pages : 240
  • ISBN 10 : 9783642973277

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Laser Assisted Microtechnology Excerpt :

Laser-Assisted Microtechnology deals with laser applications to a wide variety of problems in microelectronic design and fabrication. It covers micromachining of thin films, microprocessing of materials, maskless laser micropatterning and laser-assisted synthesis of thin-film systems. The monograph describes fundamental aspects and practical details of the technological processes as well as the optimum conditions for their realization.

Surface Modification and Alloying Book

Surface Modification and Alloying


  • Author : J.M. Poate
  • Publisher : Springer Science & Business Media
  • Release Date : 2013-11-21
  • Genre: Science
  • Pages : 414
  • ISBN 10 : 9781461337331

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Surface Modification and Alloying Excerpt :

This book is an outcome of the NATO institute on surface modification which was held in Trevi, 1981. Surface modification and alloying by ion, electron or laser beams is proving to be one of the most burgeoning areas of materials science. The field covers such diverse areas as integrated circuit processing to fabricating wear and corrosion resistant surfaces on mechanical components. The common scientific questions of interest are the microstructures by the different energy deposition techniques. and associated physical properties produced The chapters constitute a critical review of the various subjects covered at Trevi. Each chapter author took responsibility for the overall review and used contributions from the many papers presented at the meeting; each participant gave a presentation. The contributors are listed at the start of each chapter. We took this approach to get some order in a large and diverse field. We are indebted to all the contributors, in particular the chapter authors for working the many papers into coherent packages; to Jim Mayer for hosting a workshop of chapter authors at Cornell and to Ian Bubb who did a sterling job in working over some of the manuscripts. Our special thanks are due to the text processing center at Bell Labs who took on the task of assembling the book. In particular Karen Lieb and Beverly Heravi typed the whole manuscript and had the entire book phototypeset using the Bell Laboratories UNIXTM system.

Springer Handbook of Microscopy Book

Springer Handbook of Microscopy


  • Author : Peter W. Hawkes
  • Publisher : Springer Nature
  • Release Date : 2019-11-02
  • Genre: Technology & Engineering
  • Pages : 1543
  • ISBN 10 : 9783030000691

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Springer Handbook of Microscopy Excerpt :

This book features reviews by leading experts on the methods and applications of modern forms of microscopy. The recent awards of Nobel Prizes awarded for super-resolution optical microscopy and cryo-electron microscopy have demonstrated the rich scientific opportunities for research in novel microscopies. Earlier Nobel Prizes for electron microscopy (the instrument itself and applications to biology), scanning probe microscopy and holography are a reminder of the central role of microscopy in modern science, from the study of nanostructures in materials science, physics and chemistry to structural biology. Separate chapters are devoted to confocal, fluorescent and related novel optical microscopies, coherent diffractive imaging, scanning probe microscopy, transmission electron microscopy in all its modes from aberration corrected and analytical to in-situ and time-resolved, low energy electron microscopy, photoelectron microscopy, cryo-electron microscopy in biology, and also ion microscopy. In addition to serving as an essential reference for researchers and teachers in the fields such as materials science, condensed matter physics, solid-state chemistry, structural biology and the molecular sciences generally, the Springer Handbook of Microscopy is a unified, coherent and pedagogically attractive text for advanced students who need an authoritative yet accessible guide to the science and practice of microscopy.