Manufacturing Techniques for Microfabrication and Nanotechnology Book

Manufacturing Techniques for Microfabrication and Nanotechnology


  • Author : Marc J. Madou
  • Publisher : CRC Press
  • Release Date : 2011-06-13
  • Genre: Technology & Engineering
  • Pages : 670
  • ISBN 10 : 9781420055191

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Manufacturing Techniques for Microfabrication and Nanotechnology Excerpt :

Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Students can use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.

Fundamentals of Microfabrication and Nanotechnology  Three Volume Set Book

Fundamentals of Microfabrication and Nanotechnology Three Volume Set


  • Author : Marc J. Madou
  • Publisher : CRC Press
  • Release Date : 2018-12-14
  • Genre: Technology & Engineering
  • Pages : 1992
  • ISBN 10 : 9781482274660

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Fundamentals of Microfabrication and Nanotechnology Three Volume Set Excerpt :

Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options. The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.

Fundamentals of Microfabrication Book

Fundamentals of Microfabrication


  • Author : Marc J. Madou
  • Publisher : CRC Press
  • Release Date : 2018-10-08
  • Genre: Technology & Engineering
  • Pages : 752
  • ISBN 10 : 9781482274004

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Fundamentals of Microfabrication Excerpt :

MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world. A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field. Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem. New in the Second Edition Revised chapters that reflect the many recent advances in the field Updated and enhanced discussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology In-depth coverage of bio-MEMs, RF-MEMs, high-temperature, and optical MEMs. Many more links to the Web Problem sets in each chapter

Microfabrication and Nanomanufacturing Book

Microfabrication and Nanomanufacturing


  • Author : Mark J. Jackson
  • Publisher : CRC Press
  • Release Date : 2005-11-10
  • Genre: Technology & Engineering
  • Pages : 401
  • ISBN 10 : 9781420028270

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Microfabrication and Nanomanufacturing Excerpt :

Nanotechnology, seen as the next leap forward in the industrial revolution, requires that manufacturers develop processes that revolutionize the way small products are made. Microfabrication and Nanomanufacturing focuses on the technology of fabrication and manufacturing of engineering materials at these levels. The book provides an overview of techniques used in the semiconductor industry. It also discusses scaling and manufacturing processes operating at the nanoscale for non-semiconductor applications; the construction of nanoscale components using established lithographic techniques; bulk and surface micromachining techniques used for etching, machining, and molding procedures; and manufacturing techniques such as injection molding and hot embossing. This authoritative compilation describes non-traditional micro and nanoscale processing that uses a newly developed technique called pulsed water jet machining as well as the efficient removal of materials using optical energy. Additional chapters focus on the development of nanoscale processes for producing products other than semiconductors; the use of abrasive particles embedded in porous tools; and the deposition and application of nanocrystalline diamond. Economic factors are also presented and concern the promotion and commercialization of micro and nanoscale products and how demand will eventually drive the market.

Micromanufacturing Engineering and Technology Book

Micromanufacturing Engineering and Technology


  • Author : Yi Qin
  • Publisher : William Andrew
  • Release Date : 2010-07-02
  • Genre: Technology & Engineering
  • Pages : 432
  • ISBN 10 : 081551980X

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Micromanufacturing Engineering and Technology Excerpt :

This book presents applicable knowledge of technology, equipment and applications, and the core economic issues of micromanufacturing for anyone with a basic understanding of manufacturing, material, or product engineering. It explains micro-engineering issues (design, systems, materials, market and industrial development), technologies, facilities, organization, competitiveness, and innovation with an analysis of future potential. The machining, forming, and joining of miniature / micro-products are all covered in depth, covering: grinding/milling, laser applications, and photo chemical etching; embossing (hot & UV), injection molding and forming (bulk, sheet, hydro, laser); mechanical assembly, laser joining, soldering, and packaging. • Presents case studies, material and design considerations, working principles, process configurations, and information on tools, equipment, parameters and control • Explains the many facets of recently emerging additive / hybrid technologies and systems, incl: photo-electric-forming, liga, surface treatment, and thin film fabrication • Outlines system engineering issues pertaining to handling, metrology, testing, integration & software • Explains widely used micro parts in bio / medical industry, information technology and automotive engineering. • Covers technologies in high demand, such as: micro-mechanical-cutting, lasermachining, micro-forming, micro-EDM, micro-joining, photo-chemical-etching, photo-electro-forming, and micro-packaging

Micro and Nanomanufacturing Volume II Book

Micro and Nanomanufacturing Volume II


  • Author : Mark J. Jackson
  • Publisher : Springer
  • Release Date : 2017-10-28
  • Genre: Technology & Engineering
  • Pages : 570
  • ISBN 10 : 9783319671321

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Micro and Nanomanufacturing Volume II Excerpt :

This book is a comprehensive treatment of micro and nanofabrication techniques, and applies established and research laboratory manufacturing techniques to a wide variety of materials. It is a companion volume to “Micro and Nanomanufacturing” (2007) and covers new topics such as aligned nanowire growth, molecular dynamics simulation of nanomaterials, atomic force microscopy for microbial cell surfaces, 3D printing of pharmaceuticals, microvascular coaptation methods, and more. The chapters also cover a wide variety of applications in areas such as surgery, auto components, living cell detection, dentistry, nanoparticles in medicine, and aerospace components. This is an ideal text for professionals working in the field, and for graduate students in micro and nanomanufacturing courses.

Microfabrication for Industrial Applications Book

Microfabrication for Industrial Applications


  • Author : Regina Luttge
  • Publisher : William Andrew
  • Release Date : 2011
  • Genre: Technology & Engineering
  • Pages : 289
  • ISBN 10 : 9780815515821

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Microfabrication for Industrial Applications Excerpt :

This book focuses on the industrial perspective for micro- and nanofabrication methods including large-scale manufacturing, transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. It gives a history of miniaturization, micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices. Concerning sub-micron feature manufacture, the book explains: the philosophy of micro/ nanofabrication for integrated circuit industry; thin film deposition; (waveguide, plastic, semiconductor) material processing; packaging; interconnects; stress (e.g., thin film residual); economic; and environmental aspects. Micro/nanomechanical sensors and actuators are explained in depth with information on applications, materials (incl. functional polymers), methods, testing, fabrication, integration, reliability, magnetic microstructures, etc. • Shows engineers & students how to evaluate the potential value of current and nearfuture manufacturing processes for miniaturized systems in industrial environments • Explains the top-down and bottom up approaches to nanotechnology, nanostructures fabricated with beams, nano imprinting methods, nanoparticle manufacturing (and their health aspects), nanofeature analysis, and connecting nano to micro to macro • Discusses issues for practical application cases; possibilities of dimension precision; large volume manufacturing of micro- & nanostructures (machines, materials, costs) • Explains applications of Microsystems for information technology, e.g.: data recording (camera, microphone), storage (memories, CDs), communication; computing; and displays (beamers, LCD, TFT) • Case studies are given for sensors, resonators, probes, transdermal medical systems, micro- pumps & valves, inkjets, DNA-analysis, lab-on-a-chip, & micro-cooling

Micromanufacturing and Nanotechnology Book

Micromanufacturing and Nanotechnology


  • Author : Nitaigour P. Mahalik
  • Publisher : Springer Science & Business Media
  • Release Date : 2006-01-16
  • Genre: Technology & Engineering
  • Pages : 468
  • ISBN 10 : 9783540293392

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Micromanufacturing and Nanotechnology Excerpt :

Micromanufacturing and Nanotechnology is an emerging technological infrastructure and process that involves manufacturing of products and systems at the micro and nano scale levels. Development of micro and nano scale products and systems are underway due to the reason that they are faster, accurate and less expensive. Moreover, the basic functional units of such systems possesses remarkable mechanical, electronic and chemical properties compared to the macro-scale counterparts. Since this infrastructure has already become the prefered choice for the design and development of next generation products and systems it is now necessary to disseminate the conceptual and practical phenomenological know-how in a broader context. This book incorporates a selection of research and development papers. Its scope is the history and background, underlynig design methodology, application domains and recent developments.

From MEMS to Bio MEMS and Bio NEMS Book

From MEMS to Bio MEMS and Bio NEMS


  • Author : Marc J. Madou
  • Publisher : CRC Press
  • Release Date : 2011-06-13
  • Genre: Medical
  • Pages : 650
  • ISBN 10 : 9781439895245

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From MEMS to Bio MEMS and Bio NEMS Excerpt :

From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications details manufacturing techniques applicable to bionanotechnology. After reviewing MEMS techniques, materials, and modeling, the author covers nanofabrication, genetically engineered proteins, artificial cells, nanochemistry, and self-assembly. He also discusses scaling la

Emerging Nanotechnologies for Manufacturing Book

Emerging Nanotechnologies for Manufacturing


  • Author : Waqar Ahmed
  • Publisher : William Andrew
  • Release Date : 2014-09-15
  • Genre: Technology & Engineering
  • Pages : 576
  • ISBN 10 : 9780323296434

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Emerging Nanotechnologies for Manufacturing Excerpt :

In the second edition of Emerging Nanotechnologies for Manufacturing, an unrivalled team of international experts explores existing and emerging nanotechnologies as they transform large-scale manufacturing contexts in key sectors such as medicine, advanced materials, energy, and electronics. From their different perspectives, the contributors explore technologies and techniques as well as applications and how they transform those sectors. With updated chapters and expanded coverage, the new edition of Emerging Nanotechnologies for Manufacturing reflects the latest developments in nanotechnologies for manufacturing and covers additional nanotechnologies applied in the medical fields, such as drug delivery systems. New chapters on graphene and smart precursors for novel nanomaterials are also added. This important and in-depth guide will benefit a broad readership, from R&D scientists and engineers to venture capitalists. Covers nanotechnology for manufacturing techniques and applications across a variety of industries Explores the latest developments such as nanosuspensions and nanocarriers in drug delivery systems, graphene applications, and usage of smart precursors to develop nanomaterials Proven reference guide written by leading experts in the field

Nano  and Microfabrication for Industrial and Biomedical Applications Book

Nano and Microfabrication for Industrial and Biomedical Applications


  • Author : Regina Luttge
  • Publisher : William Andrew
  • Release Date : 2016-06-12
  • Genre: Technology & Engineering
  • Pages : 278
  • ISBN 10 : 9780323389280

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Nano and Microfabrication for Industrial and Biomedical Applications Excerpt :

Nano- and Microfabrication for Industrial and Biomedical Applications, Second Edition, focuses on the industrial perspective on micro- and nanofabrication methods, including large-scale manufacturing, the transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. The book gives a history of miniaturization and micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices. In this second edition, a new focus area is nanoengineering as an important driver for the rise of novel applications by integrating bio-nanofabrication into microsystems. In addition, new material covers lithographic mould fabrication for soft-lithography, nanolithography techniques, corner lithography, advances in nanosensing, and the developing field of advanced functional materials. Luttge also explores the view that micro- and nanofabrication will be the key driver for a "tech-revolution" in biology and medical research that includes a new case study that covers the developing organ-on-chip concept. Presents an interdisciplinary approach that makes micro/nanofabrication accessible equally to engineers and those with a life science background, both in academic settings and commercial R&D Provides readers with guidelines for assessing the commercial potential of any new technology based on micro/nanofabrication, thus reducing the investment risk Updated edition presents nanoengineering as an important driver for the rise of novel applications by integrating bio-nanofabrication into microsystems

Micromanufacturing Processes Book

Micromanufacturing Processes


  • Author : V.K. Jain
  • Publisher : CRC Press
  • Release Date : 2016-04-19
  • Genre: Technology & Engineering
  • Pages : 429
  • ISBN 10 : 9781439852910

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Micromanufacturing Processes Excerpt :

Increased demand for and developments in micromanufacturing have created a need for a resource that covers both the science and technology of this rapidly growing area. With contributions from eminent professors and researchers actively engaged in teaching, research, and development, Micromanufacturing Processes details the basic principles, tools,

Advanced Micro  and Nano manufacturing Technologies Book

Advanced Micro and Nano manufacturing Technologies


  • Author : Shrikrishna Nandkishor Joshi
  • Publisher : Springer Nature
  • Release Date : 2021-10-01
  • Genre: Technology & Engineering
  • Pages : 402
  • ISBN 10 : 9789811636455

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Advanced Micro and Nano manufacturing Technologies Excerpt :

This volume focuses on the fundamentals and advancements in micro and nanomanufacturing technologies applied in the biomedical and biochemical domain. The contents of this volume provide comprehensive coverage of the physical principles of advanced manufacturing technologies and the know-how of their applications in the fabrication of biomedical devices and systems. The book begins by documenting the journey of miniaturization and micro-and nano-fabrication. It then delves into the fundamentals of various advanced technologies such as micro-wire moulding, 3D printing, lithography, imprinting, direct laser machining, and laser-induced plasma-assisted machining. It also covers laser-based technologies which are a promising option due to their flexibility, ease in control and application, high precision, and availability. These technologies can be employed to process several materials such as glass, polymers: polycarbonate, polydimethylsiloxane, polymethylmethacrylate, and metals such as stainless steel, which are commonly used in the fabrication of biomedical devices, such as microfluidic technology, optical and fiber-optic sensors, and electro-chemical bio-sensors. It also discusses advancements in various MEMS/NEMS based technologies and their applications in energy conversion and storage devices. The chapters are written by experts from the fields of micro- and nano-manufacturing, materials engineering, nano-biotechnology, and end-users such as clinicians, engineers, academicians of interdisciplinary background. This book will be a useful guide for academia and industry alike.

Micro Nano Manufacturing Book

Micro Nano Manufacturing


  • Author : André Zimmermann
  • Publisher : MDPI
  • Release Date : 2019-09-03
  • Genre: Technology & Engineering
  • Pages : 208
  • ISBN 10 : 9783039211692

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Micro Nano Manufacturing Excerpt :

Micro manufacturing involves dealing with the fabrication of structures in the size range of 0.1 to 1000 µm. The scope of nano manufacturing extends the size range of manufactured features to even smaller length scales—below 100 nm. A strict borderline between micro and nano manufacturing can hardly be drawn, such that both domains are treated as complementary and mutually beneficial within a closely interconnected scientific community. Both micro and nano manufacturing can be considered as important enablers for high-end products. This Special Issue of Applied Sciences is dedicated to recent advances in research and development within the field of micro and nano manufacturing. The included papers report recent findings and advances in manufacturing technologies for producing products with micro and nano scale features and structures as well as applications underpinned by the advances in these technologies.

Inkjet based Micromanufacturing Book

Inkjet based Micromanufacturing


  • Author : Oliver Brand
  • Publisher : John Wiley & Sons
  • Release Date : 2012-04-16
  • Genre: Technology & Engineering
  • Pages : 388
  • ISBN 10 : 9783527647118

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Inkjet based Micromanufacturing Excerpt :

Inkjet-based Micromanufacturing Inkjet technology goes way beyond putting ink on paper: it enables simpler, faster and more reliable manufacturing processes in the fields of micro- and nanotechnology. Modern inkjet heads are per se precision instruments that deposit droplets of fluids on a variety of surfaces in programmable, repeating patterns, allowing, after suitable modifications and adaptations, the manufacturing of devices such as thin-film transistors, polymer-based displays and photovoltaic elements. Moreover, inkjet technology facilitates the large-scale production of flexible RFID transponders needed, eg, for automated logistics and miniaturized sensors for applications in health surveillance. The book gives an introduction to inkjet-based micromanufacturing, followed by an overview of the underlying theories and models, which provides the basis for a full understanding and a successful usage of inkjet-based methods in current microsystems research and development Overview of Inkjet-based Micromanufacturing: Thermal Inkjet Theory and Modeling Post-Printing Processes for Inorganic Inks for Plastic Electronics Applications Inkjet Ink Formulations Inkjet Fabrication of Printed Circuit Boards Antennas for Radio Frequency Identification Tags Inkjet Printing for MEMS