Microfabrication for Industrial Applications Book

Microfabrication for Industrial Applications


  • Author : Regina Luttge
  • Publisher : William Andrew
  • Release Date : 2011-08-31
  • Genre: Technology & Engineering
  • Pages : 312
  • ISBN 10 : 9780815519775

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Microfabrication for Industrial Applications Excerpt :

This book focuses on the industrial perspective for micro- and nanofabrication methods including large-scale manufacturing, transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. It gives a history of miniaturization, micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices. Concerning sub-micron feature manufacture, the book explains: the philosophy of micro/ nanofabrication for integrated circuit industry; thin film deposition; (waveguide, plastic, semiconductor) material processing; packaging; interconnects; stress (e.g., thin film residual); economic; and environmental aspects. Micro/nanomechanical sensors and actuators are explained in depth with information on applications, materials (incl. functional polymers), methods, testing, fabrication, integration, reliability, magnetic microstructures, etc. Shows engineers & students how to evaluate the potential value of current and nearfuture manufacturing processes for miniaturized systems in industrial environments Explains the top-down and bottom up approaches to nanotechnology, nanostructures fabricated with beams, nano imprinting methods, nanoparticle manufacturing (and their health aspects), nanofeature analysis, and connecting nano to micro to macro Discusses issues for practical application cases; possibilities of dimension precision; large volume manufacturing of micro- & nanostructures (machines, materials, costs) Explains applications of Microsystems for information technology, e.g.: data recording (camera, microphone), storage (memories, CDs), communication; computing; and displays (beamers, LCD, TFT) Case studies are given for sensors, resonators, probes, transdermal medical systems, micro- pumps & valves, inkjets, DNA-analysis, lab-on-a-chip, & micro-cooling

Microfabrication for Industrial Applications Book

Microfabrication for Industrial Applications


  • Author : Regina Luttge
  • Publisher : William Andrew
  • Release Date : 2011-09-14
  • Genre: Technology & Engineering
  • Pages : 314
  • ISBN 10 : 9780815515821

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Microfabrication for Industrial Applications Excerpt :

Microfabrication for Industrial Applications focuses on the industrial perspective for micro- and nanofabrication methods including large-scale manufacturing, transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. It gives a history of miniaturization, micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices. Concerning sub-micron feature manufacture, the book explains: the philosophy of micro/ nanofabrication for integrated circuit industry; thin film deposition; (waveguide, plastic, semiconductor) material processing; packaging; interconnects; stress (e.g., thin film residual); economic; and environmental aspects. Micro/nanomechanical sensors and actuators are explained in depth with information on applications, materials (incl. functional polymers), methods, testing, fabrication, integration, reliability, magnetic microstructures, etc. Shows engineers & students how to evaluate the potential value of current and nearfuture manufacturing processes for miniaturized systems in industrial environments Explains the top-down and bottom up approaches to nanotechnology, nanostructures fabricated with beams, nano imprinting methods, nanoparticle manufacturing (and their health aspects), nanofeature analysis, and connecting nano to micro to macro Discusses issues for practical application cases; possibilities of dimension precision; large volume manufacturing of micro- & nanostructures (machines, materials, costs) Explains applications of Microsystems for information technology, e.g.: data recording (camera, microphone), storage (memories, CDs), communication; computing; and displays (beamers, LCD, TFT) Case studies are given for sensors, resonators, probes, transdermal medical systems, micro- pumps & valves, inkjets, DNA-analysis, lab-on-a-chip, & micro-cooling

Nano  and Microfabrication for Industrial and Biomedical Applications Book

Nano and Microfabrication for Industrial and Biomedical Applications


  • Author : Regina Luttge
  • Publisher : William Andrew
  • Release Date : 2016-06-12
  • Genre: Technology & Engineering
  • Pages : 278
  • ISBN 10 : 9780323389280

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Nano and Microfabrication for Industrial and Biomedical Applications Excerpt :

Nano- and Microfabrication for Industrial and Biomedical Applications, Second Edition, focuses on the industrial perspective on micro- and nanofabrication methods, including large-scale manufacturing, the transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. The book gives a history of miniaturization and micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices. In this second edition, a new focus area is nanoengineering as an important driver for the rise of novel applications by integrating bio-nanofabrication into microsystems. In addition, new material covers lithographic mould fabrication for soft-lithography, nanolithography techniques, corner lithography, advances in nanosensing, and the developing field of advanced functional materials. Luttge also explores the view that micro- and nanofabrication will be the key driver for a "tech-revolution" in biology and medical research that includes a new case study that covers the developing organ-on-chip concept. Presents an interdisciplinary approach that makes micro/nanofabrication accessible equally to engineers and those with a life science background, both in academic settings and commercial R&D Provides readers with guidelines for assessing the commercial potential of any new technology based on micro/nanofabrication, thus reducing the investment risk Updated edition presents nanoengineering as an important driver for the rise of novel applications by integrating bio-nanofabrication into microsystems

Laser Precision Microfabrication Book

Laser Precision Microfabrication


  • Author : Koji Sugioka
  • Publisher : Springer
  • Release Date : 2010-08-13
  • Genre: Science
  • Pages : 344
  • ISBN 10 : 9783642105234

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Laser Precision Microfabrication Excerpt :

Miniaturization and high precision are rapidly becoming a requirement for many industrial processes and products. As a result, there is greater interest in the use of laser microfabrication technology to achieve these goals. This book composed of 16 chapters covers all the topics of laser precision processing from fundamental aspects to industrial applications to both inorganic and biological materials. It reviews the sate of the art of research and technological development in the area of laser processing.

Three Dimensional Microfabrication Using Two Photon Polymerization Book

Three Dimensional Microfabrication Using Two Photon Polymerization


  • Author : Tommaso Baldacchini
  • Publisher : William Andrew
  • Release Date : 2015-09-29
  • Genre: Technology & Engineering
  • Pages : 512
  • ISBN 10 : 9780323354059

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Three Dimensional Microfabrication Using Two Photon Polymerization Excerpt :

Three-Dimensional Microfabrication Using Two-Photon Polymerization (TPP) is the first comprehensive guide to TPP microfabrication—essential reading for researchers and engineers in areas where miniaturization of complex structures is key, such as in the optics, microelectronics, and medical device industries. TPP stands out among microfabrication techniques because of its versatility, low costs, and straightforward chemistry. TPP microfabrication attracts increasing attention among researchers and is increasingly employed in a range of industries where miniaturization of complex structures is crucial: metamaterials, plasmonics, tissue engineering, and microfluidics, for example. Despite its increasing importance and potential for many more applications, no single book to date is dedicated to the subject. This comprehensive guide, edited by Professor Baldacchini and written by internationally renowned experts, fills this gap and includes a unified description of TPP microfabrication across disciplines. The guide covers all aspects of TPP, including the pros and cons of TPP microfabrication compared to other techniques, as well as practical information on material selection, equipment, processes, and characterization. Current and future applications are covered and case studies provided as well as challenges for adoption of TPP microfabrication techniques in other areas are outlined. The freeform capability of TPP is illustrated with numerous scanning electron microscopy images. Comprehensive account of TPP microfabrication, including both photophysical and photochemical aspects of the fabrication process Comparison of TPP microfabrication with conventional and unconventional micromanufacturing techniques Covering applications of TPP microfabrication in industries such as microelectronics, optics and medical devices industries, and includes case studies and potential future directions Illustrates the freeform capability of TPP using numerous scanning electron micros

Microfluidics and Microfabrication Book

Microfluidics and Microfabrication


  • Author : Suman Chakraborty
  • Publisher : Springer
  • Release Date : 2009-12-22
  • Genre: Technology & Engineering
  • Pages : 357
  • ISBN 10 : 1441915427

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Microfluidics and Microfabrication Excerpt :

Microfluidics and Microfabrication discusses the interconnect between microfluidics, microfabrication and the life sciences. Specifically, this includes fundamental aspects of fluid mechanics in micro-scale and nano-scale confinements and microfabrication. Material is also presented discussing micro-textured engineered surfaces, high-performance AFM probe-based, micro-grooving processes, fabrication with metals and polymers in bio-micromanipulation and microfluidic applications. Editor Suman Chakraborty brings together leading minds in both fields who also: Cover the fundamentals of microfluidics in a manner accessible to multi-disciplinary researchers, with a balance of mathematical details and physical principles Discuss the explicit interconnection between microfluiodics and microfabrication from an application perspective Detail the amalgamation of microfluidics with logic circuits and applications in micro-electronics Microfluidics and Microfabrication is an ideal book for researchers, engineers and senior-level graduate students interested in learning more about the two fields.

Transport in Laser Microfabrication Book

Transport in Laser Microfabrication


  • Author : Costas P. Grigoropoulos
  • Publisher : Cambridge University Press
  • Release Date : 2009-07-30
  • Genre: Technology & Engineering
  • Pages : null
  • ISBN 10 : 9781139480512

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Transport in Laser Microfabrication Excerpt :

Emphasising the fundamentals of transport phenomena, this book provides researchers and practitioners with the technical background they need to understand laser-induced microfabrication and materials processing at small scales. It clarifies the laser/materials coupling mechanisms, and discusses the nanoscale confined laser interactions that constitute powerful tools for top-down nanomanufacturing. In addition to discussing key and emerging applications to modern technology, with particular respect to electronics, advanced topics such as the use of lasers for nanoprocessing and nanomachining, the interaction with polymer materials, nanoparticles and clusters, and the processing of thin films are also covered.

Smart Sensors and MEMS Book

Smart Sensors and MEMS


  • Author : S Nihtianov
  • Publisher : Woodhead Publishing
  • Release Date : 2018-03-09
  • Genre: Technology & Engineering
  • Pages : 604
  • ISBN 10 : 9780081020562

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Smart Sensors and MEMS Excerpt :

Smart Sensors and MEMS: Intelligent Devices and Microsystems for Industrial Applications, Second Edition highlights new, important developments in the field, including the latest on magnetic sensors, temperature sensors and microreaction chambers. The book outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, among other topics. New sections include discussions on magnetic and temperature sensors and the industrial applications of smart micro-electro-mechanical systems (MEMS). The book is an invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry. In addition, engineers looking for industrial sensing, monitoring and automation solutions will find this a comprehensive source of information. Contains new chapters that address key applications, such as magnetic sensors, microreaction chambers and temperature sensors Provides an in-depth information on a wide array of industrial applications for smart sensors and smart MEMS Presents the only book to discuss both smart sensors and MEMS for industrial applications

Nano  and Microfabrication for Industrial and Biomedical Applications Book

Nano and Microfabrication for Industrial and Biomedical Applications


  • Author : Regina Luttge
  • Publisher : William Andrew
  • Release Date : 2016-06-15
  • Genre: Uncategoriezed
  • Pages : 278
  • ISBN 10 : 0323378285

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Nano and Microfabrication for Industrial and Biomedical Applications Excerpt :

"Nano- and Microfabrication for Industrial and Biomedical Applications, Second Edition, " focuses on the industrial perspective on micro- and nanofabrication methods, including large-scale manufacturing, the transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. The book gives a history of miniaturization and micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices. In this second edition, a new focus area is nanoengineering as an important driver for the rise of novel applications by integrating bio-nanofabrication into microsystems. In addition, new material covers lithographic mould fabrication for soft-lithography, nanolithography techniques, corner lithography, advances in nanosensing, and the developing field of advanced functional materials. Luttge also explores the view that micro- and nanofabrication will be the key driver for a "tech-revolution" in biology and medical research that includes a new case study that covers the developing organ-on-chip concept. Presents an interdisciplinary approach that makes micro/nanofabrication accessible equally to engineers and those with a life science background, both in academic settings and commercial R&DProvides readers with guidelines for assessing the commercial potential of any new technology based on micro/nanofabrication, thus reducing the investment riskUpdated edition presents nanoengineering as an important driver for the rise of novel applications by integrating bio-nanofabrication into microsystems

Fundamentals of Microfabrication Book

Fundamentals of Microfabrication


  • Author : Marc J. Madou
  • Publisher : CRC Press
  • Release Date : 2018-10-08
  • Genre: Technology & Engineering
  • Pages : 764
  • ISBN 10 : 9781482274004

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Fundamentals of Microfabrication Excerpt :

MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world. A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field. Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem. New in the Second Edition Revised chapters that reflect the many recent advances in the field Updated and enhanced discussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology In-depth coverage of bio-MEMs, RF-MEMs, high-temperature, and optical MEMs. Many more links to the Web Problem sets in each chapter

3D Laser Microfabrication Book

3D Laser Microfabrication


  • Author : Hiroaki Misawa
  • Publisher : John Wiley & Sons
  • Release Date : 2006-08-21
  • Genre: Technology & Engineering
  • Pages : 403
  • ISBN 10 : 9783527608409

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3D Laser Microfabrication Excerpt :

A thorough introduction to 3D laser microfabrication technology, leading readers from the fundamentals and theory to its various potent applications, such as the generation of tiny objects or three-dimensional structures within the bulk of transparent materials. The book also presents new theoretical material on dielectric breakdown, allowing a better understanding of the differences between optical damage on surfaces and inside the bulk, as well as a look into the future. Chemists, physicists, materials scientists and engineers will find this a valuable source of interdisciplinary knowledge in the field of laser optics and nanotechnology.

Microfabrication and Precision Engineering Book

Microfabrication and Precision Engineering


  • Author : J Paulo Davim
  • Publisher : Woodhead Publishing
  • Release Date : 2017-01-15
  • Genre: Technology & Engineering
  • Pages : 286
  • ISBN 10 : 9780857094865

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Microfabrication and Precision Engineering Excerpt :

Microfabrication and precision engineering is an increasingly important area relating to metallic, polymers, ceramics, composites, biomaterials and complex materials. Micro-electro-mechanical-systems (MEMS) emphasize miniaturization in both electronic and mechanical components. Microsystem products may be classified by application, and have been applied to a variety of fields, including medical, automotive, aerospace and alternative energy. Microsystems technology refers to the products as well as the fabrication technologies used in production. With detailed information on modelling of micro and nano-scale cutting, as well as innovative machining strategies involved in microelectrochemical applications, microchannel fabrication, as well as underwater pulsed Laser beam cutting, among other techniques, Microfabrication and Precision Engineering is a valuable reference for students, researchers and professionals in the microfabrication and precision engineering fields. Contains contributions by top industry experts Includes the latest techniques and strategies Special emphasis given to state-of-the art research and development in microfabrication and precision engineering

Microfabrication and Nanomanufacturing Book

Microfabrication and Nanomanufacturing


  • Author : Mark J. Jackson
  • Publisher : CRC Press
  • Release Date : 2005-11-10
  • Genre: Technology & Engineering
  • Pages : 416
  • ISBN 10 : 9781420028270

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Microfabrication and Nanomanufacturing Excerpt :

Nanotechnology, seen as the next leap forward in the industrial revolution, requires that manufacturers develop processes that revolutionize the way small products are made. Microfabrication and Nanomanufacturing focuses on the technology of fabrication and manufacturing of engineering materials at these levels. The book provides an overview of techniques used in the semiconductor industry. It also discusses scaling and manufacturing processes operating at the nanoscale for non-semiconductor applications; the construction of nanoscale components using established lithographic techniques; bulk and surface micromachining techniques used for etching, machining, and molding procedures; and manufacturing techniques such as injection molding and hot embossing. This authoritative compilation describes non-traditional micro and nanoscale processing that uses a newly developed technique called pulsed water jet machining as well as the efficient removal of materials using optical energy. Additional chapters focus on the development of nanoscale processes for producing products other than semiconductors; the use of abrasive particles embedded in porous tools; and the deposition and application of nanocrystalline diamond. Economic factors are also presented and concern the promotion and commercialization of micro and nanoscale products and how demand will eventually drive the market.

Micro  and Nanotechnology Enabled Applications for Portable Miniaturized Analytical Systems Book

Micro and Nanotechnology Enabled Applications for Portable Miniaturized Analytical Systems


  • Author : Sabu Thomas
  • Publisher : Elsevier
  • Release Date : 2021-10-12
  • Genre: Technology & Engineering
  • Pages : 438
  • ISBN 10 : 9780128237281

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Micro and Nanotechnology Enabled Applications for Portable Miniaturized Analytical Systems Excerpt :

Micro- and Nanotechnology Enabled Applications for Portable Miniaturized Analytical Systems outlines the basic principles of miniaturized analytical devices, such as spectrometric, separation, imaging and electrochemical miniaturized instruments. Concepts such as smartphone-enabled miniaturized detection systems and micro/nanomachines are also reviewed. Subsequent chapters explore the emerging application of these mobile devices for miniaturized analysis in various fields, including medicine and biomedicine, environmental chemistry, food chemistry, and forensic chemistry. This is an important reference source for materials scientists and engineers wanting to understand how miniaturization techniques are being used to create a range of efficient, sustainable electronic and optical devices. Miniaturization describes the concept of manufacturing increasingly smaller mechanical, optical, and electronic products and devices. These smaller instruments can be used to produce micro- and nanoscale components required for analytical procedures. A variety of micro/nanoscale materials have been synthesized and used in analytical procedures, such as sensing materials, sorbents, adsorbents, catalysts, and reactors. The miniaturization of analytical instruments can be applied to the different steps of analytical procedures, such as sample preparation, analytical separation, and detection, reducing the total cost of manufacturing the instruments and the needed reagents and organic solvents. Outlines how miniaturization techniques can be used to create new optical and electronic micro- and nanodevices Explores major application areas, including biomedicine, environmental science and security Assesses the major challenges of using miniaturization techniques

Fundamentals of Microfabrication and Nanotechnology  Three Volume Set Book

Fundamentals of Microfabrication and Nanotechnology Three Volume Set


  • Author : Marc J. Madou
  • Publisher : CRC Press
  • Release Date : 2018-12-14
  • Genre: Technology & Engineering
  • Pages : 1992
  • ISBN 10 : 9781482274660

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Fundamentals of Microfabrication and Nanotechnology Three Volume Set Excerpt :

Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options. The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.