Sputtering Materials for VLSI and Thin Film Devices Book

Sputtering Materials for VLSI and Thin Film Devices


  • Author : Jaydeep Sarkar
  • Publisher : William Andrew
  • Release Date : 2010-12-13
  • Genre: Technology & Engineering
  • Pages : 608
  • ISBN 10 : 9780815519874

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Sputtering Materials for VLSI and Thin Film Devices Excerpt :

An important resource for students, engineers and researchers working in the area of thin film deposition using physical vapor deposition (e.g. sputtering) for semiconductor, liquid crystal displays, high density recording media and photovoltaic device (e.g. thin film solar cell) manufacturing. This book also reviews microelectronics industry topics such as history of inventions and technology trends, recent developments in sputtering technologies, manufacturing steps that require sputtering of thin films, the properties of thin films and the role of sputtering target performance on overall productivity of various processes. Two unique chapters of this book deal with productivity and troubleshooting issues. The content of the book has been divided into two sections: (a) the first section (Chapter 1 to Chapter 3) has been prepared for the readers from a range of disciplines (e.g. electrical, chemical, chemistry, physics) trying to get an insight into use of sputtered films in various devices (e.g. semiconductor, display, photovoltaic, data storage), basic of sputtering and performance of sputtering target in relation to productivity, and (b) the second section (Chapter 4 to Chapter 8) has been prepared for readers who already have background knowledge of sputter deposition of thin films, materials science principles and interested in the details of sputtering target manufacturing methods, sputtering behavior and thin film properties specific to semiconductor, liquid crystal display, photovoltaic and magnetic data storage applications. In Chapters 5 to 8, a general structure has been used, i.e. a description of the applications of sputtered thin films, sputtering target manufacturing methods (including flow charts), sputtering behavior of targets (e.g. current - voltage relationship, deposition rate) and thin film properties (e.g. microstructure, stresses, electrical properties, in-film particles). While discussing these topics, attempts have been made to include exam

Sputtering Materials for VLSI and Thin Film Devices Book

Sputtering Materials for VLSI and Thin Film Devices


  • Author : Jaydeep Sarkar
  • Publisher : William Andrew
  • Release Date : 2018-10-30
  • Genre: Technology & Engineering
  • Pages : 0
  • ISBN 10 : 012810080X

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Sputtering Materials for VLSI and Thin Film Devices Excerpt :

An important resource for students, engineers and researchers working in the area of thin film deposition using physical vapor deposition (e.g. sputtering) for semiconductor, liquid crystal displays, high density recording media and photovoltaic device (e.g. thin film solar cell) manufacturing. This book also reviews microelectronics industry topics such as history of inventions and technology trends, recent developments in sputtering technologies, manufacturing steps that require sputtering of thin films, the properties of thin films and the role of sputtering target performance on overall productivity of various processes. Two unique chapters of this book deal with productivity and troubleshooting issues. The content of the book has been divided into two sections: (a) the first section (Chapter 1 to Chapter 3) has been prepared for the readers from a range of disciplines (e.g. electrical, chemical, chemistry, physics) trying to get an insight into use of sputtered films in various devices (e.g. semiconductor, display, photovoltaic, data storage), basic of sputtering and performance of sputtering target in relation to productivity, and (b) the second section (Chapter 4 to Chapter 8) has been prepared for readers who already have background knowledge of sputter deposition of thin films, materials science principles and interested in the details of sputtering target manufacturing methods, sputtering behavior and thin film properties specific to semiconductor, liquid crystal display, photovoltaic and magnetic data storage applications. In Chapters 5 to 8, a general structure has been used, i.e. a description of the applications of sputtered thin films, sputtering target manufacturing methods (including flow charts), sputtering behavior of targets (e.g. current - voltage relationship, deposition rate) and thin film properties (e.g. microstructure, stresses, electrical properties, in-film particles). While discussing these topics, attempts have been made to include exam

The Foundations of Vacuum Coating Technology Book

The Foundations of Vacuum Coating Technology


  • Author : Donald M. Mattox
  • Publisher : William Andrew
  • Release Date : 2018-08-21
  • Genre: Technology & Engineering
  • Pages : 378
  • ISBN 10 : 9780128130858

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The Foundations of Vacuum Coating Technology Excerpt :

The Foundations of Vacuum Coating Technology, Second Edition, is a revised and expanded version of the first edition, which was published in 2003. The book reviews the histories of the various vacuum coating technologies and expands on the history of the enabling technologies of vacuum technology, plasma technology, power supplies, and low-pressure plasma-enhanced chemical vapor deposition. The melding of these technologies has resulted in new processes and products that have greatly expanded the application of vacuum coatings for use in our everyday lives. The book is unique in that it makes extensive reference to the patent literature (mostly US) and how it relates to the history of vacuum coating. The book includes a Historical Timeline of Vacuum Coating Technology and a Historical Timeline of Vacuum/Plasma Technology, as well as a Glossary of Terms used in the vacuum coating and surface engineering industries. History and detailed descriptions of Vacuum Deposition Technologies Review of Enabling Technologies and their importance to current applications Extensively referenced text Patents are referenced as part of the history Historical Timelines for Vacuum Coating Technology and Vacuum/Plasma Technology Glossary of Terms for vacuum coating

Advances In Smart Coatings And Thin Films For Future Industrial and Biomedical Engineering Applications Book

Advances In Smart Coatings And Thin Films For Future Industrial and Biomedical Engineering Applications


  • Author : Abdel Salam Hamdy Makhlouf
  • Publisher : Elsevier
  • Release Date : 2019-10-25
  • Genre: Technology & Engineering
  • Pages : 680
  • ISBN 10 : 9780128118931

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Advances In Smart Coatings And Thin Films For Future Industrial and Biomedical Engineering Applications Excerpt :

Advances In Smart Coatings And Thin Films For Future Industrial and Biomedical Engineering Applications discusses in detail, the recent trends in designing, fabricating and manufacturing of smart coatings and thin films for future high-tech. industrial applications related to transportation, aerospace and biomedical engineering. Chapters cover fundamental aspects and diverse approaches used to fabricate smart self-healing anti-corrosion coatings, shape-memory coatings, polymeric and nano-bio-ceramic cotings, bio-inspired and stimuli-responsive coatings for smart surfaces with antibacterial activkity and controlled wettability, and electrically conductive coatings and their emerging applications. With the emphasis on advanced methodologies and recent emerging applications of smart multifunctional coatings and thin films, this book is essential reading for materials scientists and rsearchers working in chemical sciences, advanced materials, sensors, pharmaceutical and biomedical engineering. Discusses the most recent advances and innovations in smart multifunctional coatings and thin films in the transportation, aerospace and biomedical engineering industries Highlights the synthesis methods, processing, testing and characterization of smart coatings and thin films Reviews the current prospects and future trends within the industry

Perovskite Ceramics Book

Perovskite Ceramics


  • Author : Jose Luis Clabel Huaman
  • Publisher : Elsevier
  • Release Date : 2022-11-21
  • Genre: Technology & Engineering
  • Pages : 626
  • ISBN 10 : 9780323907101

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Perovskite Ceramics Excerpt :

Perovskite-based ceramics are a significant class of innovative materials with fascinating physical properties, which are now receiving intensive research attention in condensed matter physics and in the area of practical device applications. Perovskite Ceramics provides a state-of-the-art review on the latest advances in perovskite-based ceramic materials, as well as the development of devices from these materials for different applications. Perovskite Ceramics: Recent Advances and Emerging Applications is divided into two main parts. The first part focuses on the basics of perovskite-based ceramic materials and includes chapters on the fundamentals, synthesis and processing, characterization, and properties of these materials. Chapters are also included on bulk and thin materials, phase transitions, polaronic effects and the compensation and screening of ferroelectricity. This section will allow the reader to familiarize themselves with the standard traditional approach, but it will also introduce new concepts that are fast evolving in this field. The second part presents an extensive review of up-to-date research on new and innovative advances in perovskite-based ceramic materials. Chapters cover multiferroic applications, lead-free perovskites, energy storage applications, perovskite-based memories, light manipulation and spectral modifications, and solar cells and fuel cells. All these fields of research are rapidly evolving, so the book acts a platform to showcase latest results on optical strategies and materials for light manipulation, and spectral up- and down-conversion too (mainly rare earth doped oxides and complexes). The book will be an essential reference resource for academic and industrial researchers working in materials research and development particularly in functional and oxide ceramics and perovskites. A comprehensive and systematic review of advanced research in perovskite-based ceramics Covers both oxide and halide perovskites, their synthes

High Mobility Materials for CMOS Applications Book

High Mobility Materials for CMOS Applications


  • Author : Nadine Collaert
  • Publisher : Woodhead Publishing
  • Release Date : 2018-06-29
  • Genre: Technology & Engineering
  • Pages : 384
  • ISBN 10 : 9780081020623

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High Mobility Materials for CMOS Applications Excerpt :

High Mobility Materials for CMOS Applications provides a comprehensive overview of recent developments in the field of (Si)Ge and III-V materials and their integration on Si. The book covers material growth and integration on Si, going all the way from device to circuit design. While the book's focus is on digital applications, a number of chapters also address the use of III-V for RF and analog applications, and in optoelectronics. With CMOS technology moving to the 10nm node and beyond, however, severe concerns with power dissipation and performance are arising, hence the need for this timely work on the advantages and challenges of the technology. Addresses each of the challenges of utilizing high mobility materials for CMOS applications, presenting possible solutions and the latest innovations Covers the latest advances in research on heterogeneous integration, gate stack, device design and scalability Provides a broad overview of the topic, from materials integration to circuits

Nano Optoelectronic Sensors and Devices Book

Nano Optoelectronic Sensors and Devices


  • Author : Ning Xi
  • Publisher : William Andrew
  • Release Date : 2011-11-29
  • Genre: Technology & Engineering
  • Pages : 273
  • ISBN 10 : 9781437734713

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Nano Optoelectronic Sensors and Devices Excerpt :

Nanophotonics has emerged as a major technology and applications domain, exploiting the interaction of light-emitting and light-sensing nanostructured materials. These devices are lightweight, highly efficient, low on power consumption, and are cost effective to produce. The authors of this book have been involved in pioneering work in manufacturing photonic devices from carbon nanotube (CNT) nanowires and provide a series of practical guidelines for their design and manufacture, using processes such as nano-robotic manipulation and assembly methods. They also introduce the design and operational principles of opto-electrical sensing devices at the nano scale. Thermal annealing and packaging processes are also covered, as key elements in a scalable manufacturing process. Examples of applications of different nanowire based photonic devices are presented. These include applications in the fields of electronics (e.g. FET, CNT Schotty diode) and solar energy. Discusses opto-electronic nanomaterials, characterization and properties from an engineering perspective, enabling the commercialization of key emerging technologies Provides scalable techniques for nanowire structure growth, manipulation and assembly (i.e. synthesis) Explores key application areas such as sensing, electronics and solar energy

Ceramic Thick Films for MEMS and Microdevices Book

Ceramic Thick Films for MEMS and Microdevices


  • Author : Robert A. Dorey
  • Publisher : William Andrew
  • Release Date : 2011-10-21
  • Genre: Science
  • Pages : 217
  • ISBN 10 : 9781437778175

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Ceramic Thick Films for MEMS and Microdevices Excerpt :

The MEMS (Micro Electro-Mechanical Systems) market returned to growth in 2010. The total MEMS market is worth about $6.5 billion, up more than 11 percent from last year and nearly as high as its historic peak in 2007. MEMS devices are used across sectors as diverse as automotive, aerospace, medical, industrial process control, instrumentation and telecommunications - forming the nerve center of products including airbag crash sensors, pressure sensors, biosensors and ink jet printer heads. Part of the MEMS cluster within the Micro & Nano Technologies Series, this book covers the fabrication techniques and applications of thick film piezoelectric micro electromechanical systems (MEMS). It includes examples of applications where the piezoelectric thick films have been used, illustrating how the fabrication process relates to the properties and performance of the resulting device. Other topics include: top-down and bottom-up fabrication of thick film MEMS, integration of thick films with other materials, effect of microstructure on properties, device performance, etc. Provides detailed guidance on the fabrication techniques and applications of thick film MEMS, for engineers and R&D groups Written by a single author, this book provides a clear, coherently written guide to this important emerging technology Covers materials, fabrication and applications in one book

TMS 2016 Supplemental Proceedings Book

TMS 2016 Supplemental Proceedings


  • Author : The Minerals, Metals & Materials Society (TMS)
  • Publisher : John Wiley & Sons
  • Release Date : 2016-02-09
  • Genre: Technology & Engineering
  • Pages : 824
  • ISBN 10 : 9781119274889

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TMS 2016 Supplemental Proceedings Excerpt :

The TMS 2016 Annual Meeting Supplemental Proceedings is a collection of papers from the TMS 2016 Annual Meeting & Exhibition, held February 14-18 in Nashville, Tennessee, USA. The papers in this volume represent 21 symposia from the meeting. This volume, along with the other proceedings volumes published for the meeting, and archival journals, such as Metallurgical and Materials Transactions and Journal of Electronic Materials, represents the available written record of the 67 symposia held at TMS2016. This proceedings volume contains both edited and unedited papers; the unedited papers have not necessarily been reviewed by the symposium organizers and are presented “as is.” The opinions and statements expressed within the papers are those of the individual authors only, and no confirmations or endorsements are intended or implied.

Emerging Nanotechnologies in Dentistry Book
Score: 5
From 2 Ratings

Emerging Nanotechnologies in Dentistry


  • Author : Karthikeyan Subramani
  • Publisher : William Andrew
  • Release Date : 2011-11-15
  • Genre: Technology & Engineering
  • Pages : 412
  • ISBN 10 : 9781455778577

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Emerging Nanotechnologies in Dentistry Excerpt :

New nanomaterials are leading to a range of emerging dental treatments that utilize more biomimetic materials that more closely duplicate natural tooth structure (or bone, in the case of implants). The use of nanostructures that will work in harmony with the body’s own regenerative processes (eg, to restore tooth structure or alveolar bone) are moving into clinical practice. This book brings together an international team of experts from the fields of nanomaterials, biomedical engineering and dentistry, to cover the new materials and techniques with potential for use intra-orally or extra-orally for the restoration, fixation, replacement, or regeneration of hard and soft tissues in and about the oral cavity and craniofacial region. New dental nanotechnologies include the use of advanced inorganic and organic materials, smart and biomimetic materials, tissue engineering and drug delivery strategies. Book prepared by an interdisciplinary and international group of bio-nanomaterial scientists and dental/oral biomedical researchers Comprehensive professional reference for the subject covering materials fabrication and use of materials for all major diagnostic and therapeutic dental applications – repair,restoration, regeneration, implants and prevention Book focuses in depth on the materials manufacturing processes involved with emphasis on pre-clinical and clinical applications, use and biocompatibility

Micromixers Book

Micromixers


  • Author : Nam-Trung Nguyen
  • Publisher : William Andrew
  • Release Date : 2011-09-17
  • Genre: Technology & Engineering
  • Pages : 368
  • ISBN 10 : 9781437735215

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Micromixers Excerpt :

The ability to mix minute quantities of fluids is critical in a range of recent and emerging techniques in engineering, chemistry and life sciences, with applications as diverse as inkjet printing, pharmaceutical manufacturing, specialty and hazardous chemical manufacturing, DNA analysis and disease diagnosis. The multidisciplinary nature of this field – intersecting engineering, physics, chemistry, biology, microtechnology and biotechnology – means that the community of engineers and scientists now engaged in developing microfluidic devices has entered the field from a variety of different backgrounds. Micromixers is uniquely comprehensive, in that it deals not only with the problems that are directly related to fluidics as a discipline (aspects such as mass transport, molecular diffusion, electrokinetic phenomena, flow instabilities, etc.) but also with the practical issues of fabricating micomixers and building them into microsystems and lab-on-chip assemblies.With practical applications to the design of systems vital in modern communications, medicine and industry this book has already established itself as a key reference in an emerging and important field. The 2e includes coverage of a broader range of fabrication techniques, additional examples of fully realized devices for each type of micromixer and a substantially extended section on industrial applications, including recent and emerging applications. Introduces the design and applications of micromixers for a broad audience across chemical engineering, electronics and the life sciences, and applications as diverse as lab-on-a-chip, ink jet printing, pharmaceutical manufacturing and DNA analysis Helps engineers and scientists to unlock the potential of micromixers by explaining both the scientific (microfluidics) aspects and the engineering involved in building and using successful microscale systems and devices with micromixers The author's applied approach combines experience-based discussion of the

CMOS Past  Present and Future Book

CMOS Past Present and Future


  • Author : Henry Radamson
  • Publisher : Woodhead Publishing
  • Release Date : 2018-04-03
  • Genre: Technology & Engineering
  • Pages : 278
  • ISBN 10 : 9780081021408

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CMOS Past Present and Future Excerpt :

CMOS Past, Present and Future provides insight from the basics, to the state-of-the-art of CMOS processing and electrical characterization, including the integration of Group IV semiconductors-based photonics. The book goes into the pitfalls and opportunities associated with the use of hetero-epitaxy on silicon with strain engineering and the integration of photonics and high-mobility channels on a silicon platform. It begins with the basic definitions and equations, but extends to present technologies and challenges, creating a roadmap on the origins of the technology and its evolution to the present, along with a vision for future trends. The book examines the challenges and opportunities that materials beyond silicon provide, including a close look at high-k materials and metal gate, strain engineering, channel material and mobility, and contacts. The book's key approach is on characterizations, device processing and electrical measurements. Addresses challenges and opportunities for the use of CMOS Covers the latest methods of strain engineering, materials integration to increase mobility, nano-scaled transistor processing, and integration of CMOS with photonic components Provides a look at the evolution of CMOS technology, including the origins of the technology, current status and future possibilities

Electronic Materials Handbook Book
Score: 4.5
From 4 Ratings

Electronic Materials Handbook


  • Author : Anonim
  • Publisher : ASM International
  • Release Date : 1989-11-01
  • Genre: Technology & Engineering
  • Pages : 1234
  • ISBN 10 : 0871702851

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Electronic Materials Handbook Excerpt :

Volume 1: Packaging is an authoritative reference source of practical information for the design or process engineer who must make informed day-to-day decisions about the materials and processes of microelectronic packaging. Its 117 articles offer the collective knowledge, wisdom, and judgement of 407 microelectronics packaging experts-authors, co-authors, and reviewers-representing 192 companies, universities, laboratories, and other organizations. This is the inaugural volume of ASMAs all-new ElectronicMaterials Handbook series, designed to be the Metals Handbook of electronics technology. In over 65 years of publishing the Metals Handbook, ASM has developed a unique editorial method of compiling large technical reference books. ASMAs access to leading materials technology experts enables to organize these books on an industry consensus basis. Behind every article. Is an author who is a top expert in its specific subject area. This multi-author approach ensures the best, most timely information throughout. Individually selected panels of 5 and 6 peers review each article for technical accuracy, generic point of view, and completeness.Volumes in the Electronic Materials Handbook series are multidisciplinary, to reflect industry practice applied in integrating multiple technology disciplines necessary to any program in advanced electronics. Volume 1: Packaging focusing on the middle level of the electronics technology size spectrum, offers the greatest practical value to the largest and broadest group of users. Future volumes in the series will address topics on larger (integrated electronic assemblies) and smaller (semiconductor materials and devices) size levels.

Semiconductor Material and Device Characterization Book

Semiconductor Material and Device Characterization


  • Author : Dieter K. Schroder
  • Publisher : John Wiley & Sons
  • Release Date : 2015-06-29
  • Genre: Technology & Engineering
  • Pages : 800
  • ISBN 10 : 9780471739067

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Semiconductor Material and Device Characterization Excerpt :

This Third Edition updates a landmark text with the latest findings The Third Edition of the internationally lauded Semiconductor Material and Device Characterization brings the text fully up-to-date with the latest developments in the field and includes new pedagogical tools to assist readers. Not only does the Third Edition set forth all the latest measurement techniques, but it also examines new interpretations and new applications of existing techniques. Semiconductor Material and Device Characterization remains the sole text dedicated to characterization techniques for measuring semiconductor materials and devices. Coverage includes the full range of electrical and optical characterization methods, including the more specialized chemical and physical techniques. Readers familiar with the previous two editions will discover a thoroughly revised and updated Third Edition, including: Updated and revised figures and examples reflecting the most current data and information 260 new references offering access to the latest research and discussions in specialized topics New problems and review questions at the end of each chapter to test readers' understanding of the material In addition, readers will find fully updated and revised sections in each chapter. Plus, two new chapters have been added: Charge-Based and Probe Characterization introduces charge-based measurement and Kelvin probes. This chapter also examines probe-based measurements, including scanning capacitance, scanning Kelvin force, scanning spreading resistance, and ballistic electron emission microscopy. Reliability and Failure Analysis examines failure times and distribution functions, and discusses electromigration, hot carriers, gate oxide integrity, negative bias temperature instability, stress-induced leakage current, and electrostatic discharge. Written by an internationally recognized authority in the field, Semiconductor Material and Device Characterization remains essential reading for graduate